• Covers SEMs, TEMs, STEMs, and FIB systems: how and why they work
• Explains how to use computer tools for designing instrumentation
• Analyzes aberrations and space charge effects: factors that limit the performance of high resolution instrumentation
• Describes how resolution is defined
• Explains how magnetic and electrostatic lenses work and how they are built and used
• Presents up-to-date information on Schottky electron and liquid metal ion sources
• Provides very complete references to past and present work in this field

This timely handbook contains chapters on the essential elements of high resolution charged particle optics and is written by many of the world's leading research scientists. It is a complete guide to understanding, designing, and using high resolution instrumentation such as transmission electron microscopes (TEMs), scanning electron microscopes (SEMs), scanning transmission electron microscopes (STEMs), and focused ion beam (FIB) systems. This handbook is evenly balanced between theory and application, and covers all the most important topics in this growing area. Handbook of High Resolution Charged Particle Optics explains how and why high resolution instruments work and how to apply this information when designing or using them.